Yakakwirira-kuchena gasi pombi tekinoroji chikamu chakakosha chepamusoro-kuchena gasi rekupa system, iyo yakakosha tekinoroji kuendesa inodiwa yakakwirira-kuchena gasi kusvika pakushandisa uye ichiri kuchengetedza inokodzera mhando;Yakakwira-kuchena gasi pombi tekinoroji inosanganisira iyo chaiyo dhizaini yehurongwa, kusarudzwa kwezvigadziriso uye zvishongedzo, kuvaka uye kuisirwa, uye kuyedza.Mumakore achangopfuura, izvo zvinonyanya kuomesesa zvinodiwa pakuchena uye kusachena kwemukati-kuchena magasi mukugadzirwa kwezvigadzirwa zvemakroelectronics zvinomiririrwa nemasekete makuru akabatanidzwa akaita kuti tekinoroji yepombi yemagasi akachena awedzere kunetseka nekusimbiswa.Izvi zvinotevera muchidimbu kupfupikiswa kwepamusoro-kuchena gasi pombi kubva pakusarudzwa kwezvinhuof kuvaka, pamwe nekugamuchirwa uye kutonga kwezuva nezuva.
Mhando dzemagasi akajairika
Kurongeka kwemagasi akajairika muindasitiri yemagetsi:
Magasi akajairika(Gasi rakawanda）: hydrogen (H2), nitrogen (N2), oxygen (O2), argon (A2), nezvimwewo.
Specialty magasivari SiH4 ,PH3 ,B2H6 ,A8H3 ,CL ,HCL,CF4 ,NH3,POCL3, SIH2CL2 SIHCL3,NH3, BCL3 ,SIF4 ,CLF3 ,CO,C2F6, N2O,F2,HF,HBR SF6…… etc.
Mhando dzemagasi akakosha anogona kuverengerwa seanooragasi, zvine chepfugasi, zvinobvira motogasi, zvinobviragasi, inertgasi, etc. Magasi anowanzo shandiswa semiconductor anowanzo kuiswa sezvinotevera.
(i) Inoparadza / ine chepfugasi: HCl , BF3, WF6, HBr , SiH2Cl2, NH3, PH3, Cl2, BCl3…etc.
(ii) Kupisagasi:H2, CH4, SiH4, PH3, ASH3, SiH2Cl2,B2H6, CH2F2,CH3F, CO… nezvimwewo.
(iii) kupisagasi:O2, Cl2,N2O, NF3… etc.
(iv) Inertgasi:N2, CF4, C2F6, C4F8,SF6, CO2, Ne, Kr, Iye…etc.
Mazhinji semiconductor magasi anokuvadza kumuviri wemunhu.Kunyanya, mamwe emagasi aya, akadai seSiH4 kupisa kunongoerekana kwaitika, chero bedzi kuputika kuchaita nechisimba neokisijeni mumhepo uye inotanga kupisa;uye ash3ine muchetura zvakanyanya, chero kudonha kudiki kungakonzeresa njodzi yehupenyu hwevanhu, imhaka yenjodzi idzi dziri pachena, saka zvinodiwa zvekuchengetedza dhizaini yehurongwa zvakanyanya kukwirira.
Kushandiswa kwehuwandu hwemagasi
Sechinhu chakakosha chakakosha indasitiri yemazuva ano, zvigadzirwa zvegasi zvinoshandiswa zvakanyanya, uye huwandu hukuru hwemagasi akajairika kana magasi akakosha anoshandiswa musimbi, simbi, peturu, indasitiri yemakemikari, michina, zvemagetsi, girazi, ceramics, zvekuvakisa, kuvaka. , kugadzira chikafu, mishonga uye zvikamu zvekurapa.Kushandiswa kwegasi kune zvakakosha pahunyanzvi hwepamusoro hweminda iyi kunyanya, uye ndiyo inonyanya kukosha gasi remagetsi kana gasi rekugadzira.Chete nezvido uye kusimudzirwa kweakasiyana siyana maindasitiri ezvikamu uye sainzi yemazuva ano uye tekinoroji, zvigadzirwa zveindasitiri yegasi zvinogona kuvandudzwa nekusvetuka uye miganhu maererano nekusiyana, mhando uye huwandu.
Gasi kushandiswa mune microelectronics uye semiconductor indasitiri
Kushandiswa kwegasi kwagara kuchiita basa rakakosha mukuita semiconductor, kunyanya iyo semiconductor process yakashandiswa zvakanyanya mumaindasitiri akasiyana, kubva kune yechinyakare ULSI, TFT-LCD kusvika ikozvino micro-electro-mechanical (MEMS) indasitiri, zvese iyo inoshandisa iyo inonzi semiconductor process senzira yekugadzira zvigadzirwa.Kuchena kwegasi kune chekuita kwakasimba pakuita kwezvikamu uye goho rezvigadzirwa, uye kuchengetedzwa kwegasi rekupa kune hukama nehutano hwevashandi uye kuchengetedzwa kwekushanda kwechirimwa.
Kukosha kwepamusoro-kuchena pombi mune yakakwirira-kuchena gasi kutakura
Mukuita kwekunyunguduka kwesimbi isina tsvina nekugadzira zvinhu, inenge 200g yegasi inogona kutorwa patani.Mushure mekugadzirwa kwesimbi isina tsvina, kwete chete nzvimbo yayo inonamira neyakasiyana-siyana yakasvibiswa, asiwo mune yayo simbi lattice yakatorawo imwe huwandu hwegasi.Kana mhepo ichiyerera nepapombi, simbi inobata chikamu ichi chegasi chinozopindazve mumhepo, ichisvibisa gasi rakachena.Kana mafambiro emhepo ari muchubhu akamira kuyerera, chubhu inoshambadza gasi iri pasi pekumanikidzwa, uye kana mafambiro emhepo amira kupfuura, gasi rinoshambadzirwa nechubhu rinoita donho rekumanikidza kugadzirisa, uye gasi rakagadziriswa rinopindawo mugasi rakachena muchubhu. setsvina.Panguva imwecheteyo, adsorption uye kugadziriswa zvinodzokororwa, kuitira kuti simbi iri mukati mehubhu inobudisawo humwe huwandu hwehupfu, uye iyi guruva resimbi inosvibisawo gasi rakachena mukati mechubhu.Ichi chimiro chechubhu chakakosha kuti ive nechokwadi chekuchena kwegasi rinotakurwa, izvo zvinoda kwete chete kutsetseka kwakanyanya kwemukati wechubhu, asiwo yakakwirira kupfeka kusagadzikana.
Kana gasi rine corrosive performance rashandiswa, pombi dzesimbi isingadziviriri dzinofanira kushandiswa pakupomba.Zvikasadaro, pombi inoburitsa makwapa ekuora mukati memukati nekuda kwekuora, uye muzviitiko zvakakomba, pachava nenzvimbo yakakura yekubvisa simbi kana kutobhowa, izvo zvinosvibisa gasi rakachena richagovaniswa.
Kubatana kwepamusoro-kuchena uye kwepamusoro-kuchena gasi kutapurirana uye kugovera mapaipi emazinga makuru ekuyerera.
Muchidimbu, ese ari welded, uye machubhu anoshandiswa anodiwa kuti asave neshanduko musangano kana welding ichiiswa.Zvishandiso zvine kabhoni yakawandisa zvinoiswa pasi pemhepo yekupinda kwezvikamu zvakashongedzwa kana welding, izvo zvinoita kuti kupindirana kwegasi mukati nekunze kwepombi kuparadze kuchena, kuoma uye kuchena kwegasi rinofambiswa, zvichikonzera kurasikirwa kwegasi. kuedza kwedu kwose.
Muchidimbu, kune yakakwirira-kuchena gasi uye yakakosha gasi kutapurirana pombi, zvinodikanwa kushandisa yakakosha kurapwa kwepamusoro-kuchena simbi pombi, kugadzira yakakwirira-kuchena pombi system (kusanganisira mapaipi, mafittings, mavharuvhu, VMB, VMP) mu high-purity gasi kugovera kunotora basa rakakosha.
General pfungwa yakachena tekinoroji yekutapurirana uye kugovera mapaipi
Yakanyanya kuchena uye yakachena gasi kutapurirana nepombi zvinoreva kuti pane zvimwe zvinodikanwa kana zvidzoreso zvezvikamu zvitatu zvegasi rinofanira kutakurwa.
Kuchena kwegasi: Zviri mukati memhepo isina kuchena mune gGas kuchena: Zviri mukati memhepo yekusachena mugasi, kazhinji inoratidzirwa sechikamu chegasi kuchena, senge 99.9999%, zvakare inoratidzwa seyevhoriyamu reshiyo yekusachena kwemukati ppm, ppb, ppt.
Dryness: huwandu hwekutsvagisa hunyoro mugasi, kana huwandu hunodaidzwa kunyorova, hunowanzo ratidzwa maererano nedova, senge atmospheric pressure dew point -70.C.
Hutsanana: nhamba yezvimedu zvinosvibisa zviri mugasi, saizi ye µm, mangani zvimedu/M3 kutaura, yemhepo yakamanikidzwa, inowanzo ratidzwa maererano nengani mamg/m3 ezvisingadzivisike zvakasara, izvo zvinofukidza mafuta zvirimo. .
Yakasvibiswa saizi yemhando: zvidimbu zvinosvibisa, zvinonyanya kureva kukweshwa kwepombi, kupfeka, ngura inogadzirwa nesimbi zvidimbu, mhepo yepasi soot particles, pamwe nema microorganisms, phages uye hunyoro-ine gasi condensation madonhwe, nezvimwewo, zvichienderana nehukuru hwehukuru hwayo. rakakamurwa kuita
a) Zvimedu zvakakura - particle size pamusoro pe5μm
b) Particle - zvinhu dhayamita pakati 0.1μm-5μm
c) Ultra-micro zvidimbu - particle size isingasviki 0.1μm.
Kuti uwedzere mashandisirwo eiyi tekinoroji, kukwanisa kunzwisisa kunzwisisa kwehukuru hwechikamu uye μm mayunitsi, seti yechaiwo chimiro chechikamu chinopihwa kuti chitariswe.
Izvi zvinotevera kuenzanisa kwezvimedu zvakananga
| Zita / Saizi yechikamu (µm) | Zita / Saizi yechikamu (µm) | Zita/ Saizi yechikamu (µm) |
| Hutachiona 0.003-0.0 | Aerosol 0.03-1 | Aerosolized microdroplet 1-12 |
| Mafuta enyukireya 0.01-0.1 | Pendi 0.1-6 | Fly ash 1-200 |
| Carbon dema 0.01-0.3 | Mukaka hupfu 0.1-10 | Mushonga wezvipembenene 5-10 |
| Resin 0.01-1 | Utachiona 0.3-30 | Simende huruva 5-100 |
| Utsi hwefodya 0.01-1 | Ivhu rejecha 0.5-5 | Mukume 10-15 |
| Silicone 0.02-0.1 | Mushonga wezvipembenene 0.5-10 | Bvudzi revanhu 50-120 |
| Crystallized munyu 0.03-0.5 | Yakaiswa guruva resarufa 1-11 | Jecha regungwa 100-1200 |
Nguva yekutumira: Jun-14-2022